Structure and formation method of semiconductor device with monoatomic etch stop layer

ABSTRACT

A method for forming a semiconductor device structure is provided. The method includes providing a substrate. The method includes forming a gate structure over the substrate. The gate structure has a first sidewall. The method includes forming a spacer element over the first sidewall of the gate structure. The method includes forming a source/drain portion adjacent to the spacer element and the gate structure. The source/drain portion has a first top surface. The method includes depositing an etch stop layer over the first top surface of the source/drain portion. The etch stop layer is made of nitride. The method includes forming a dielectric layer over the etch stop layer. The dielectric layer has a second sidewall and a bottom surface, the etch stop layer is in direct contact with the bottom surface, and the spacer element is in direct contact with the second sidewall.

CROSS REFERENCE

This application is a Continuation of U.S. application Ser. No.15/646,386, filed on Jul. 11, 2017, the entirety of which isincorporated by reference herein.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experienced rapidgrowth. Continuing advances in semiconductor manufacturing processeshave resulted in semiconductor devices with finer features and/or higherdegrees of integration. Functional density (i.e., the number ofinterconnected devices per chip area) has generally increased whilefeature size (i.e., the smallest component that can be created using afabrication process) has decreased. This scaling-down process generallyprovides benefits by increasing production efficiency and loweringassociated costs.

Despite groundbreaking advances in materials and fabrication, scalingplanar devices such as the metal-oxide-semiconductor field effecttransistor (MOSFET) device has proven challenging. To overcome thesechallenges, circuit designers look to novel structures to deliverimproved performance, which has resulted in the development ofthree-dimensional designs, such as fin-like field effect transistors(FinFETs). The FinFET is fabricated with a thin vertical “fin” (or finstructure) extending up from a substrate. The channel of the FinFET isformed in this vertical fin. A gate is provided over the fin to allowthe gate to control the channel from multiple sides. Advantages of theFinFET may include a reduction of the short channel effect, reducedleakage, and higher current flow.

However, since feature sizes continue to decrease, fabrication processescontinue to become more difficult to perform. Therefore, it is achallenge to form a reliable semiconductor device including the FinFET.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It shouldbe noted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1J are cross-sectional views of various stages of a process forforming a semiconductor device structure, in accordance with someembodiments.

FIGS. 2A-2E are cross-sectional views of various stages of a process forforming an etch stop layer, in accordance with some embodiments.

FIG. 3 is a cross-sectional view of a semiconductor device structure inaccordance with some embodiments of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, theperformance of a first process before a second process in thedescription that follows may include embodiments in which the secondprocess is performed immediately after the first process, and may alsoinclude embodiments in which additional processes may be performedbetween the first and second processes. Various features may bearbitrarily drawn in different scales for the sake of simplicity andclarity. Moreover, the formation of a first feature over or on a secondfeature in the description that follows may include embodiments in whichthe first and second features are formed in direct contact, and may alsoinclude embodiments in which additional features may be formed betweenthe first and second features, such that the first and second featuresmay not be in direct contact. In some embodiments, the presentdisclosure may repeat reference numerals and/or letters in some variousexamples. This repetition is for the purpose of simplicity and clarityand does not in itself dictate a relationship between some variousembodiments and/or configurations discussed.

Furthermore, spatially relative terms, such as “beneath,” “below,”“lower,” “above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Some embodiments of the disclosure are described. Additional operationscan be provided before, during, and/or after the stages described inthese embodiments. Some of the stages that are described can be replacedor eliminated for different embodiments. Additional features can beadded to the semiconductor device structure. Some of the featuresdescribed below can be replaced or eliminated for different embodiments.Although some embodiments are discussed with operations performed in aparticular order, these operations may be performed in another logicalorder.

The fins may be patterned by any suitable method. For example, the finsmay be patterned using one or more photolithography processes, includingdouble-patterning or multi-patterning processes. Generally,double-patterning or multi-patterning processes combine photolithographyand self-aligned processes, allowing patterns to be created that have,for example, pitches smaller than what is otherwise obtainable using asingle, direct photolithography process. For example, in one embodiment,a sacrificial layer is formed over a substrate and patterned using aphotolithography process. Spacers are formed alongside the patternedsacrificial layer using a self-aligned process. The sacrificial layer isthen removed, and the remaining spacers may then be used to pattern thefins.

FIGS. 1A-1J are cross-sectional views of various stages of a process forforming a semiconductor device structure, in accordance with someembodiments. As shown in FIG. 1A, a fin structure 102 is formed over asemiconductor substrate 100, in accordance with some embodiments.

In some embodiments, the semiconductor substrate 100 is a bulksemiconductor substrate, such as a semiconductor wafer. For example, thesemiconductor substrate 100 is a silicon wafer. The semiconductorsubstrate 100 may include silicon or another elementary semiconductormaterial such as germanium. In some other embodiments, the semiconductorsubstrate 100 includes a compound semiconductor. The compoundsemiconductor may include gallium arsenide, silicon carbide, indiumarsenide, indium phosphide, another suitable material, or a combinationthereof.

In some embodiments, the semiconductor substrate 100 includes asemiconductor-on-insulator (SOI) substrate. The SOI substrate may befabricated using a separation by implantation of oxygen (SIMOX) process,a wafer bonding process, another applicable method, or a combinationthereof.

In some embodiments, the semiconductor substrate 100 is an un-dopedsubstrate. However, in some other embodiments, the semiconductorsubstrate 100 is a doped substrate such as a P-type substrate or anN-type substrate.

In some embodiments, the semiconductor substrate 100 includes variousdoped regions (not shown) depending on design requirements of thesemiconductor device. The doped regions include, for example, p-typewells and/or n-type wells. In some embodiments, the doped regions aredoped with p-type dopants. For example, the doped regions are doped withboron or BF₂. In some embodiments, the doped regions are doped withn-type dopants. For example, the doped regions are doped with phosphoror arsenic. In some embodiments, some of the doped regions are p-typedoped, and the other doped regions are n-type doped.

In some embodiments, multiple recesses (or trenches) are formed in thesemiconductor substrate 100. As a result, the fin structure 102 isformed between the recesses. In some embodiments, one or morephotolithography and etching processes are used to form the recesses.

As shown in FIG. 1A, one or more isolation structures includingisolation structures 104 are formed over the semiconductor substrate 100and formed in the recesses to surround lower portion of the finstructure 102, in accordance with some embodiments. The isolationstructures 104 are adjacent to the fin structure 102. In someembodiments, the isolation structures 104 continuously surround thelower portion of the fin structure 102. Upper portion of the finstructure 102 protrudes from the top surfaces of the isolation features104.

The isolation structures 104 are used to define and electrically isolatevarious device elements formed in and/or over the semiconductorsubstrate 100. In some embodiments, the isolation structure 104 includesa shallow trench isolation (STI) feature, a local oxidation of silicon(LOCOS) feature, another suitable isolation structure, or a combinationthereof.

In some embodiments, the isolation structures 104 have a multi-layerstructure. In some embodiments, the isolation structures 104 are made ofa dielectric material. The dielectric material may include siliconoxide, silicon nitride, silicon oxynitride, fluoride-doped silicateglass (FSG), low-K dielectric material, another suitable material, or acombination thereof. In some embodiments, an STI liner (not shown) isformed to reduce crystalline defects at the interface between thesemiconductor substrate 100 and the isolation structures 104. The STIliner may also be used to reduce crystalline defects at the interfacebetween the fin structures and the isolation structures 104.

It should be noted that, the term “silicon nitride” herein meansSi_(x)N_(y), where x is generally 3 but may also be 4 or any othernumber which indicates a number of atoms of silicon that will form astable compound with y nitrogen atoms, and y is usually 4 but may be anyother number that represents a number of nitrogen atoms that will form astable compound with x silicon atoms.

In some embodiments, a dielectric layer is deposited over thesemiconductor substrate 100 using a chemical vapor deposition (CVD)process, a spin-on process, another applicable process, or a combinationthereof. The dielectric layer covers the fin structure 102 and fills therecesses between the fin structures. In some embodiments, aplanarization process is performed to thin down the dielectric layer.For example, the dielectric layer is thinned until the fin structure 102is exposed. The planarization process may include a chemical mechanicalpolishing (CMP) process, a grinding process, a dry polishing process, anetching process, another applicable process, or a combination thereof.Afterwards, the dielectric layer is etched back to be below the top ofthe fin structure 102. As a result, the isolation structures 104 areformed. The fin structure 102 protrudes from the top surface of theisolation structures 104, as shown in FIG. 1A in accordance with someembodiments.

As shown in FIG. 1B, one or more gate structures are formed over thesemiconductor substrate 100 and the fin structure 102, in accordancewith some embodiments. To simplify the diagram, only three gatestructure, namely the first gate structure 106A, the second gatestructure 106B and the third gate structure 106C, are depicted. Thesemiconductor device structure may include fewer or more gatestructures.

It should be understood that, although the terms first, second, thirdetc. may be used herein to describe various elements, components,regions, layers, portions and/or sections, these elements, components,regions, layers, portions and/or sections should not be limited by theseterms. These terms are only used to distinguish one element, component,region, layer, portion or section from another element, component,region, layer, portion or section. Thus, a first element, component,region, layer, portion or section discussed below could be termed asecond element, component, region, layer, portion or section withoutdeparting from the teachings of the present disclosure.

As shown in FIG. 1B, the first gate structure 106A is formed over thetop surface of the fin structure 102, in accordance with someembodiments. As shown in FIG. 1B, the first gate structure 106A includesa first gate dielectric layer 108A over the top surface of the finstructure 102 of the semiconductor substrate 100 and a first gateelectrode 110A over the first gate dielectric layer 108A, in accordancewith some embodiments.

As shown in FIG. 1B, the second gate structure 106B and third gatestructure 106C are positioned at opposite ends of the fin structure 102,in accordance with some embodiments. As shown in FIG. 1B, the first gatestructure 106A is positioned between the second gate structure 106B andthird gate structure 106C, in accordance with some embodiments.

As shown in FIG. 1B, the second gate structure 106B is formed over aportion of the top surface of the fin structure 102, over the sidesurface of the fin structure 102 at one end of the fin structure 102,and over the isolation structure 104, in accordance with someembodiments. As shown in FIG. 1B, the third gate structure 106C isformed over a portion of the top surface of the fin structure 102, overthe side surface of the fin structure 102 at the other end of the finstructure 102, and over the isolation structure 104, in accordance withsome embodiments.

As shown in FIG. 1B, the second gate structure 106B includes a secondgate dielectric layer 108B over a portion of the top surface of the finstructure 102, over the side surface of the fin structure 102 at one endof the fin structure 102, and over the isolation structure 104, inaccordance with some embodiments. As shown in FIG. 1B, the second gatestructure 106B further includes a second gate electrode 110B over thesecond gate dielectric layer 108B, in accordance with some embodiments.

Still referring to FIG. 1B, the third gate structure 106C includes athird gate dielectric layer 108C over a portion of the top surface ofthe fin structure 102, over the side surface of the fin structure 102 atthe other end of the fin structure 102, and over the isolation structure104, in accordance with some embodiments. As shown in FIG. 1B, the thirdgate structure 106C further includes a third gate electrode 110C overthe third gate dielectric layer 108C, in accordance with someembodiments.

In some embodiments, each of the gate dielectric layers 108A, 108B and108C is made of silicon oxide, silicon nitride, silicon oxynitride,high-k material, another suitable dielectric material, or a combinationthereof. In some embodiments, the high-k material may include, but isnot limited to, metal oxide, metal nitride, metal silicide, transitionmetal oxide, transition metal nitride, transition metal silicide,transition metal oxynitride, metal aluminate, zirconium silicate,zirconium aluminate. For example, the material of the high-k materialmay include, but is not limited to, LaO, AlO, ZrO, TiO, Ta₂O₅, Y₂O₃,SrTiO₃(STO), BaTiO₃(BTO), BaZrO, HfO₂, HfO₃, HfZrO, HfLaO, HfSiO,HfSiON, LaSiO, AlSiO, HfTaO, HfTiO, HfTaTiO, HfAlON, (Ba,Sr)TiO₃(BST),Al₂O₃, another suitable high-k dielectric material, or a combinationthereof.

In some embodiments, each of the gate electrodes 110A, 110B and 110C ismade of polysilicon, a metal material, another suitable conductivematerial, or a combination thereof. In some embodiments, the metalmaterial may include, but is not limited to, copper, aluminum, gold,tungsten, molybdenum, titanium, tantalum, platinum, or hafnium.

In some embodiments, the gate structures 106A, 106B and 106C are dummygate structures. In some embodiments, the gate dielectric layers 108A,108B and 108C are dummy gate dielectric layers and will be replaced withother gate dielectric layers. In some embodiments, the first gateelectrode 110A, 110B and 110C are dummy gate electrodes and will bereplaced with another conductive material such as a metal material. Thedummy gate electrode layer is made of, for example, polysilicon.

In some embodiments, a gate dielectric material layer (not shown) and agate electrode material layer (not shown) are sequentially depositedover the semiconductor substrate 100, the fin structure 102 and theisolation structure 104. In some embodiments, the gate dielectricmaterial layer and the gate electrode material layer are sequentiallydeposited by using applicable deposition methods. In some embodiments,the applicable deposition methods for depositing the gate dielectricmaterial layer may include a chemical vapor deposition (CVD) process, anatomic layer deposition (ALD) process, a thermal oxidation process, aspin-on coating process, another applicable process, or a combinationthereof. In some embodiments, the applicable deposition methods fordepositing the gate electrode material layer may include a chemicalvapor deposition (CVD), a physical vapor deposition (PVD) process, oranother applicable method.

Afterwards, according to some embodiments of the present disclosure, thegate dielectric material layer and the gate electrode material layer arepatterned to form the first gate structure 106A including the first gatedielectric layer 108A and the first gate electrode 110A, form the secondgate structure 106B including the second gate dielectric layer 108B andthe second gate electrode 110B, and form the third gate structure 106Cincluding the third gate dielectric layer 108C and the third gateelectrode 110C.

Still referring to FIG. 1B, the first gate structure 106A has sidewalls112A, the second gate dielectric layer 108B has sidewalls 112B, and thethird gate structure 106C has sidewalls 112C, in accordance with someembodiments.

Afterwards, as shown in FIG. 1B, spacer elements 114 are formed over thesidewalls 112A of the first gate structure 106A, the sidewalls 112B ofthe gate structure 106B and the sidewalls 112C of the third gatestructure 106C, in accordance with some embodiments. The spacer elements114 may be used to assist in a subsequent formation of source/drainportions. In some embodiments, the spacer elements 114 include one ormore layers.

In some embodiments, the spacer elements 114 are made of a dielectricmaterial. The dielectric material may include silicon oxide, siliconnitride, silicon oxynitride, another suitable material, or a combinationthereof. In some embodiments, the spacer elements 114 are made of acarbon-containing dielectric material. In some embodiments, thecarbon-containing dielectric material includes carbon-containing siliconoxide, carbon-containing silicon nitride, carbon-containing siliconoxynitride, another suitable material, or a combination thereof. In someembodiments, the spacer elements 114 are low-k spacer elements. In someembodiments, the spacer elements 114 have an amorphous structure.

It should be noted that, the term “silicon oxide” means and includessilicon dioxide (“SiO₂”), silicon oxide (“SiO”), TEOS, a silicon-richsilicon oxynitride, atomic layer deposition (“ALD”) SiO or SiO₂, orother silicon oxide-based material.

In some embodiments, a spacer material layer is deposited over the gatestructures 106A, 106B and 106C using a CVD process, a PVD process, aspin-on process, another applicable process, or a combination thereof.Afterwards, the spacer material layer is partially removed using anetching process, such as an anisotropic etching process. As a result,the remaining portions of the spacer material layer over the sidewalls112A of the first gate structure 106A, the sidewalls 112B of the gatestructure 106B and the sidewalls 112C of the third gate structure 106Cform the spacer elements 114.

As shown in FIG. 1C, portions of the semiconductor substrate 100 areremoved to form a first recess 116A and a second recess 116B in thesemiconductor substrate 100, in accordance with some embodiments. Asshown in FIG. 1C, the first recess 116A and the second recess 116Bextend into the semiconductor substrate 100 from a surface of thesemiconductor substrate 100, in accordance with some embodiments.

As shown in FIG. 1C, the first recess 116A and the second recess 116Bare at opposite sides of the first gate structure 106A, in accordancewith some embodiments. As shown in FIG. 1C, the first recess 116A isbetween the first gate structure 106A and the second gate structure106B, in accordance with some embodiments. As shown in FIG. 1C, thesecond recess 116B is between the first gate structure 106A and thethird gate structure 106C, in accordance with some embodiments. In someembodiments, a photolithography process and an etching process areperformed to form the first recess 116A and the second recess 116B.

Afterwards, as shown in FIG. 1D, source/drain portions includingsource/drain portions 118 are formed in the fin structure 102 of thesemiconductor substrate 100, in accordance with some embodiments. Asshown in FIG. 1D, two source/drain portions 118 are formed in the firstrecess 116A and the second recess 116B respectively, in accordance withsome embodiments. As shown in FIG. 1D, the source/drain portion 118extends under the spacer elements 114, in accordance with someembodiments.

As shown in FIG. 1D, one of the two source/drain portions 118 is formedbetween the first gate structure 106A and the second gate structure106B. As shown in FIG. 1D, this source/drain portion 118 is formedadjacent to the first gate structure 106A and the second gate structure106B and adjacent to the spacer elements 114 over the sidewalls 112A ofthe first gate structure 106A and the sidewalls 112B of the gatestructure 106B, in accordance with some embodiments.

As shown in FIG. 1D, another one of the two source/drain portions 118 isformed between the first gate structure 106A and the third gatestructure 106C, as shown in FIG. 1D, in accordance with someembodiments. As shown in FIG. 1D, this source/drain portion 118 isformed adjacent to the first gate structure 106A and the third gatestructure 106C and adjacent to the spacer elements 114 over the sidewall112A of the first gate structure 106C and the sidewall 112C of the thirdgate structure 106C, in accordance with some embodiments.

In some embodiments, a semiconductor material is epitaxially grown inthe first recess 116A and the second recess 116B to form thesource/drain portions 118. In some embodiments, the source/drain portion118 is made of silicon, silicon germanium, silicon phosphide, or acombination thereof. In some embodiments, the source/drain portions 118are an n-type semiconductor material. The source/drain portions 118 mayinclude epitaxially grown silicon, epitaxially grown silicon phosphide(SiP), or another applicable epitaxially grown semiconductor material.The source/drain portions 118 are not limited to being an n-typesemiconductor material. In some other embodiments, the source/drainportions 118 are made of a p-type semiconductor material. For example,the source/drain portions 118 may include epitaxially grown silicongermanium.

In some embodiments, the source/drain portions 118 impart stress orstrain to the channel region under the gate structure 106A to enhancethe carrier mobility of the device and improve device performance.

In some embodiments, the source/drain portions 118 have a crystallinestructure. In some embodiments, the source/drain portions 118 have asingle crystalline structure. As shown in FIG. 1D, the source/drainportion 118 has a top surface 120, in accordance with some embodiments.

Afterwards, as shown in FIG. 1E, an etch stop layer 122 is depositedover the top surface 120 of the source/drain portion 118 by performingan atomic layer deposition process, in accordance with some embodiments.In some embodiments, in the atomic layer deposition process, the etchstop layer 122 is grown from or deposited over the top surface 120 ofthe source/drain portion 118. In some embodiments, in the atomic layerdeposition process, the etch stop layer 122 is not grown from ordeposited over the side surface 124 of the spacer elements 114.Therefore, as shown in FIG. 1E, the etch stop layer 122 exposes thespacer elements 114, in accordance with some embodiments.

In some embodiments, before the atomic layer deposition process isperformed, an etching process is performed to remove the native oxideover the top surface 120 of the source/drain portion 118. However,embodiments of the disclosure are not limited thereto. In some otherembodiments, this etching process is not performed.

In some embodiments, the etch stop layer 122 is made of silicon nitride.However, embodiments of the disclosure are not limited thereto. In someother embodiments, the etch stop layer 122 is made of other suitablematerial.

In some embodiments, the etch stop layer 122 is formed by the processshown in FIGS. 2A-2E. FIGS. 2A-2E are cross-sectional views of variousstages of a process for forming the etch stop layer 122, in accordancewith some embodiments.

In some embodiments, the etch stop layer 122 is made of silicon nitride.FIG. 2A is a partially enlarged view of the source/drain portion 118. Asshown in FIG. 2A, in the atomic layer deposition process, a firstnitride layer 202 is deposited over the top surface 120 of thesource/drain portion 118 by performing a first nitridation process, inaccordance with some embodiments.

In some embodiments, before the first nitridation process is performed,an etching process is performed to remove the native oxide over the topsurface 120 of the source/drain portion 118. However, embodiments of thedisclosure are not limited thereto. In some other embodiments, thisetching process is not performed.

In some embodiments, in the first nitridation process, the first nitridelayer 202 is grown from or deposited over the top surface 120 of thesource/drain portion 118. In some embodiments, in the first nitridationprocess, the first nitride layer 202 is not grown from or deposited overthe side surface 124 of the spacer elements 114. Therefore, as shown inFIG. 2A, the first nitride layer 202 exposes the spacer elements 114, inaccordance with some embodiments.

In some embodiments, the first nitridation process applies an ammoniaplasma or a nitrogen plasma to the structure shown in FIG. 1D to formthe first nitride layer 202 over the top surface 120 of the source/drainportion 118. In some embodiments, the first nitridation process appliesthe ammonia plasma or the nitrogen plasma onto the top surface 120 ofthe source/drain portion 118. In some embodiments, the power of theammonia plasma or the nitrogen plasma is in a range from about 100W toabout 3000W, for example, from about 500W to about 1000W.

The term “about” typically means +/−20% of the stated value, moretypically +/−10% of the stated value, more typically +/−5% of the statedvalue, more typically +/−3% of the stated value, more typically +/−2% ofthe stated value, more typically +/−1% of the stated value and even moretypically +/−0.5% of the stated value. The stated value of the presentdisclosure is an approximate value. When there is no specificdescription, the stated value includes the meaning of “about”.

In some embodiments, the exposed top surface 120 of the source/drainportion 118 in FIG. 1D has a first crystallinity, and the side surface124 of the spacer elements 114 in FIG. 1D has a second crystallinity. Insome embodiments, the first crystallinity is greater than the secondcrystallinity. In some embodiments, the exposed top surface 120 of thesource/drain portion 118 in FIG. 1D has a crystalline structure, whereasthe side surface 124 of the spacer elements 114 in FIG. 1D has anamorphous structure. In some embodiments, the exposed top surface 120 ofthe source/drain portion 118 in FIG. 1D has a single crystallinestructure.

In some embodiments, since the first crystallinity of the exposed topsurface 120 of the source/drain portion 118 is greater than the secondcrystallinity of the exposed side surface 124 of the spacer elements114, the nitridation of the exposed top surface 120 of the source/drainportion 118 is easier to start than the nitridation of the exposed sidesurface 124 of the spacer elements 114. Therefore, in some embodiments,after starting the first nitridation process from a first nitridationstart time-point, the nitridation of the top surface 120 of thesource/drain portion 118 starts at a first time-point from the firstnitridation start time-point. In some embodiments, the nitridation ofthe spacer elements 114 starts at a second time-point from the firstnitridation start time-point. In some embodiments, the second time-pointis greater than the first time-point.

In some embodiments, the time duration from the first nitridation starttime-point to the first time-point is the time required to start thenitridation of the top surface 120 of the source/drain portion 118. Insome embodiments, the time duration from the first nitridation starttime-point to the second time-point is the time required to start thenitridation of the side surface 124 of the spacer elements 114. In someembodiments, the time duration from the first nitridation starttime-point to the second time-point is greater than the time durationfrom the first nitridation start time-point to the first time-point. Insome embodiments, the time required to start the nitridation of the sidesurface 124 of the spacer elements 114 is longer than the time requiredto start the nitridation of the top surface 120 of the source/drainportion 118.

In some embodiments, when the first nitridation start time-point is setat zero seconds, the first time-point is in a range from about 40seconds to about 600 seconds, for example from about 70 seconds to about400 seconds, for example from about 100 seconds to about 200 seconds. Insome embodiments, the time duration from the first nitridation starttime-point to the first time-point is the time required to start thenitridation of the top surface 120 of the source/drain portion 118. Insome embodiments, the time duration from the first nitridation starttime-point to the first time-point is in a range from about 40 secondsto about 600 seconds, for example from about 70 seconds to about 400seconds, for example from about 100 seconds to about 200 seconds.

In some embodiments, when the first nitridation start time-point is setat zero seconds, the second time-point is in a range from about 70seconds to about 700 seconds, for example from about 100 seconds toabout 500 seconds, for example from about 200 seconds to about 300seconds. In some embodiments, the time duration from the firstnitridation start time-point to the second time-point is the timerequired to start the nitridation of the side surface 124 of the spacerelements 114. In some embodiments, the time duration from the firstnitridation start time-point to the second time-point is in a range fromabout 70 seconds to about 700 seconds, for example from about 100seconds to about 500 seconds, for example from about 200 seconds toabout 300 seconds.

In some embodiments, the first nitridation process is performed from thefirst nitridation start time-point to a first nitridation endtime-point, and the first nitridation end time-point is between thefirst time-point and the second time-point.

In some embodiments, when the first nitridation start time-point is setat zero seconds, the first nitridation end time-point is in a range fromabout 50 seconds to about 600 seconds, for example from about 100seconds to about 500 seconds, for example from about 200 seconds toabout 400 seconds, for example from about 250 seconds to about 300seconds. In some embodiments, the time duration from the firstnitridation start time-point to the first nitridation end time-point isreferred to as the process time of the first nitridation process. Insome embodiments, the time duration from the first nitridation starttime-point to the first nitridation end time-point is in a range fromabout 50 seconds to about 600 seconds, for example from about 100seconds to about 500 seconds, for example from about 200 seconds toabout 400 seconds, for example from about 250 seconds to about 300seconds.

In some embodiments, since the first nitridation end time-point of thefirst nitridation process is after the first time-point and before thesecond time-point, when the first nitridation process stopped at thefirst nitridation end time-point, the nitridation of the top surface 120of the source/drain portion 118 has already started, whereas thenitridation of the spacer elements 114 has not started yet. Therefore,in some embodiments, in the first nitridation process, the first nitridelayer 202 is grown from or deposited over the top surface 120 of thesource/drain portion 118, but is not grown from or deposited over theside surface 124 of the spacer elements 114.

In some embodiments, the first nitride layer 202 is a monatomic layer.In some embodiments, one (or more) of the nitrogen atoms in the firstnitride layer 202 is bonded to the silicon atom in the source/drainportion 118 and/or another one (or more than one) nitrogen atom in thefirst nitride layer 202. In some embodiments, the thickness of the firstnitride layer 202 is in a range from about 5 angstrom to about 20angstrom, for example from about 10 angstrom to about 15 angstrom.

Afterwards, as shown in FIG. 2B, the atomic layer deposition processfurther includes performing a first silicon deposition process todeposit a first silicon layer 204 over the first nitride layer 202, inaccordance with some embodiments. As shown in FIG. 2B, the first siliconlayer 204 has a top surface 206, in accordance with some embodiments.

In some embodiments, a silicon-containing precursor is applied to thefirst nitride layer 202 to form the first silicon layer 204 over thefirst nitride layer 202. In some embodiments, the silicon-containingprecursor includes, but is not limited to, dichlorosilane (DCS),monochlorosilane (MCS), trichlorosilane (TCS), tetrachlorosilane(SiCl₄), and hexachlorodisilane (HCDS), silane (SiH₄), another suitablematerial, or a combination thereof. In some embodiments, thesilicon-containing precursor is in a gaseous state.

In some embodiments, in the first silicon deposition process, thesilicon atom of the silicon-containing precursor is bonded to thenitrogen atom in the first nitride layer 202 to form the first siliconlayer 204 over the first nitride layer 202. Therefore, in someembodiments, in the first silicon deposition process, the first siliconlayer 204 is grown from or deposited over the first nitride layer 202,but is not grown from or deposited over the side surface 124 of thespacer elements 114.

In some embodiments, the first silicon layer 204 is a monatomic layer.In some embodiments, the thickness of the first silicon layer 204 is ina range from about 5 angstrom to about 20 angstrom, for example fromabout 10 angstrom to about 15 angstrom.

Afterwards, as shown in FIG. 2C, in the atomic layer deposition process,a second nitride layer 208 is deposited over the top surface 206 of thefirst silicon layer 204 by performing a second nitridation process, inaccordance with some embodiments.

In some embodiments, in the second nitridation process, the secondnitride layer 208 is grown from or deposited over the top surface 206 ofthe first silicon layer 204. In some embodiments, in the secondnitridation process, the second nitride layer 208 is not grown from ordeposited over the side surface 124 of the spacer elements 114.Therefore, as shown in FIG. 2C, the second nitride layer 208 exposes thespacer elements 114, in accordance with some embodiments.

In some embodiments, the second nitridation process applies an ammoniaplasma or a nitrogen plasma to the structure shown in FIG. 2B to formthe second nitride layer 208 over the top surface 206 of the firstsilicon layer 204. In some embodiments, the second nitridation processapplies the ammonia plasma or the nitrogen plasma onto the top surface206 of the first silicon layer 204. In some embodiments, the power ofthe ammonia plasma or the nitrogen plasma is in a range from about 100Wto about 3000W, for example, from about 500W to about 1000W.

In some embodiments, the exposed top surface 206 of the first siliconlayer 204 in FIG. 2B has a third crystallinity, and the side surface 124of the spacer elements 114 in FIG. 2B has the second crystallinity. Insome embodiments, the third crystallinity is greater than the secondcrystallinity. In some embodiments, the exposed top surface 206 of thefirst silicon layer 204 in FIG. 2B has a crystalline structure, whereasthe side surface 124 of the spacer elements 114 in FIG. 2B has anamorphous structure. In some embodiments, the exposed top surface 206 ofthe first silicon layer 204 in FIG. 2B has a single crystallinestructure.

In some embodiments, since the third crystallinity of the exposed topsurface 206 of the first silicon layer 204 is greater than the secondcrystallinity of the exposed side surface 124 of the spacer elements114, the nitridation of the exposed top surface 206 of the first siliconlayer 204 is easier to start than the nitridation of the exposed sidesurface 124 of the spacer elements 114. Therefore, in some embodiments,after starting the second nitridation process from a second nitridationstart time-point, the nitridation of the top surface 206 of the firstsilicon layer 204 starts at a third time-point from the secondnitridation start time-point. In some embodiments, the nitridation ofthe spacer elements 114 starts at a second time-point from the secondnitridation start time-point. In some embodiments, the second time-pointis greater than the third time-point.

In some embodiments, the time duration from the second nitridation starttime-point to the third time-point is the time required to start thenitridation of the top surface 206 of the first silicon layer 204. Insome embodiments, the time duration from the second nitridation starttime-point to the second time-point is the time required to start thenitridation of the side surface 124 of the spacer elements 114. In someembodiments, the time duration from the second nitridation starttime-point to the second time-point is greater than the time durationfrom the second nitridation start time-point to the third time-point. Insome embodiments, the time required to start the nitridation of the sidesurface 124 of the spacer elements 114 is longer than the time requiredto start the nitridation of the top surface 206 of the first siliconlayer 204.

In some embodiments, when the second nitridation start time-point is setat zero seconds, the third time-point is in a range from about 40seconds to about 600 seconds, for example from about 70 seconds to about400 seconds, for example from about 100 seconds to about 200 seconds. Insome embodiments, the time duration from the second nitridation starttime-point to the third time-point is the time required to start thenitridation of the top surface 206 of the first silicon layer 204. Insome embodiments, the time duration from the second nitridation starttime-point to the third time-point is in a range from about 40 secondsto about 600 seconds, for example from about 70 seconds to about 400seconds, for example from about 100 seconds to about 200 seconds.

In some embodiments, when the second nitridation start time-point is setat zero seconds, the second time-point is in a range from about 70seconds to about 700 seconds, for example from about 100 seconds toabout 500 seconds, for example from about 200 seconds to about 300seconds. In some embodiments, the time duration from the secondnitridation start time-point to the second time-point is the timerequired to start the nitridation of the side surface 124 of the spacerelements 114. In some embodiments, the time duration from the secondnitridation start time-point to the second time-point is in a range fromabout 70 seconds to about 700 seconds, for example from about 100seconds to about 500 seconds, for example from about 200 seconds toabout 300 seconds.

In some embodiments, the second nitridation process is performed fromthe second nitridation start time-point to a second nitridation endtime-point, and the second nitridation end time-point is between thethird time-point and the second time-point.

In some embodiments, when the second nitridation start time-point is setat zero seconds, the second nitridation end time-point is in a rangefrom about 50 seconds to about 600 seconds, for example from about 100seconds to about 500 seconds, for example from about 200 seconds toabout 400 seconds, for example from about 250 seconds to about 300seconds. In some embodiments, the time duration from the secondnitridation start time-point to the second nitridation end time-point isreferred to as the process time of the second nitridation process. Insome embodiments, the time duration from the second nitridation starttime-point to the second nitridation end time-point is in a range fromabout 50 seconds to about 600 seconds, for example from about 100seconds to about 500 seconds, for example from about 200 seconds toabout 400 seconds, for example from about 250 seconds to about 300seconds.

In some embodiments, since the second nitridation end time-point of thesecond nitridation process is after the third time-point and before thesecond time-point, when the second nitridation process stopped at thesecond nitridation end time-point, the nitridation of the top surface206 of the first silicon layer 204 has already started, whereas thenitridation of the spacer elements 114 has not started yet. Therefore,in some embodiments, in the second nitridation process, the secondnitride layer 208 is grown from or deposited over the top surface 206 ofthe first silicon layer 204, but is not grown from or deposited over theside surface 124 of the spacer elements 114.

In some embodiments, the second nitride layer 208 is a monatomic layer.In some embodiments, one (or more) of the nitrogen atoms in the secondnitride layer 208 is bonded to the silicon atom in the first siliconlayer 204 and/or another one (or more than one) nitrogen atom in thesecond nitride layer 208. In some embodiments, the thickness of thesecond nitride layer 208 is in a range from about 5 angstrom to about 20angstrom, for example from about 10 angstrom to about 15 angstrom.

Afterwards, as shown in FIG. 2D, the atomic layer deposition processfurther includes performing a second silicon deposition process todeposit a second silicon layer 210 over the second nitride layer 208, inaccordance with some embodiments.

In some embodiments, a silicon-containing precursor is applied to thesecond nitride layer 208 to form the second silicon layer 210 over thesecond nitride layer 208. In some embodiments, the silicon-containingprecursor includes, but is not limited to, dichlorosilane (DCS),monochlorosilane (MCS), trichlorosilane (TCS), tetrachlorosilane(SiCl₄), and hexachlorodisilane (HCDS), silane (SiH₄), another suitablematerial, or a combination thereof. In some embodiments, thesilicon-containing precursor is in a gaseous state.

In some embodiments, in the second silicon deposition process, thesilicon atom of the silicon-containing precursor is bonded to thenitrogen atom in the second nitride layer 208 to form the second siliconlayer 210 over the second nitride layer 208. Therefore, in someembodiments, in the second silicon deposition process, the secondsilicon layer 210 is grown from or deposited over the second nitridelayer 208, but is not grown from or deposited over the side surface 124of the spacer elements 114.

In some embodiments, the second silicon layer 210 is a monatomic layer.In some embodiments, the thickness of the second silicon layer 210 is ina range from about 5 angstrom to about 20 angstrom, for example fromabout 10 angstrom to about 15 angstrom.

Afterwards, as shown in FIG. 2E, the second nitridation process and thesecond silicon deposition process are alternatively performed toalternatively deposit the nitride layers and silicon layers over thesecond silicon layer 210 to form the silicon nitride etch stop layer122, in accordance with some embodiments.

In some embodiments, by the atomic layer deposition process shown inFIGS. 2A-2E, the etch stop layer 122 is grown from or deposited over thetop surface 120 of the source/drain portion 118, but is not grown fromor deposited over the side surface 124 of the spacer elements 114.Therefore, as shown in FIGS. 1E and 2E, the etch stop layer 122 coversand contacts the lower portion of the spacer elements 114, and exposesthe upper portion of the spacer elements 114, in accordance with someembodiments.

In the description, relative terms such as “lower,” “upper,”“horizontal,” “vertical,”, “above,” “below,” “up,” “down,” “top” and“bottom” as well as derivative thereof (e.g., “horizontally,”“downwardly,” “upwardly,” etc.) should be construed to refer to theorientation as then described or as shown in the drawing underdiscussion. These relative terms are for convenience of description anddo not require that the semiconductor device structure to be constructedor operated in a particular orientation.

As shown in FIG. 2E, the layer 212 is the top-most layer of the siliconnitride etch stop layer 122, in accordance with some embodiments. Insome embodiments, the layer 212 is a nitride layer. In some otherembodiments, the layer 212 is a silicon layer.

In some embodiments, the etch stop layer 122 may have any number ofalternatively deposited nitride layers and silicon layers. In someembodiments, the etch stop layer 122 includes two layers, i.e. the firstnitride layer 202 and the first silicon layer 204. In some otherembodiments, the etch stop layer 122 includes four layers, i.e. thefirst nitride layer 202, the first silicon layer 204, the second nitridelayer 208 and the second silicon layer 210. However, embodiments of thedisclosure are not limited thereto. In some other embodiments, the etchstop layer 122 may have any number of alternatively deposited nitridelayers and silicon layers. In some embodiments, the total number ofalternatively deposited nitride layers and silicon layers of the etchstop layer 122 is in a range from 2 to 100, for example from 10 to 20.

In addition, embodiments of the disclosure are not limited thereto. Insome other embodiments, the etch stop layer 122 is made of anothersuitable material such as silicon oxide or silicon oxynitride. In someembodiments, these etch stop layers 122 having material other thansilicon nitride are deposited over the top surface 120 of thesource/drain portion 118 by the atomic layer deposition process similarto that shown in FIGS. 2A-2E. Therefore, in some embodiments, the etchstop layer 122 having material other than silicon nitride is grown fromor deposited over the top surface 120 of the source/drain portion 118,but is not grown from or deposited over the side surface 124 of thespacer elements 114.

As shown in FIG. 2E, the etch stop layer 122 has a thickness T in arange from about 1 nm to about 100 nm, for example, from about 5 nm toabout 10 nm, in accordance with some embodiments. Referring back to FIG.1E, the top surface of the etch stop layer 122 and the side surface 124of the upper portion of the spacer elements 114 exposed by the etch stoplayer 122 together form the opening 125, in accordance with someembodiments.

Afterwards, as shown in FIG. 1F, an interlayer dielectric layer 126 issubsequently formed in the opening 125 to surround the spacer elements114, the first gate structure 106A, the second gate structure 106B andthe third gate structure 106C, in accordance with some embodiments. Asshown in FIG. 1F, the interlayer dielectric layer 126 covers thesource/drain portions 118 and the etch stop layer 122, in accordancewith some embodiments. As shown in FIG. 1F, the interlayer dielectriclayer 126 contacts the upper portion of the spacer elements 114, whilethe etch stop layer 122 contacts a lower portion of the spacer elements114, in accordance with some embodiments.

In some embodiments, a dielectric material layer is deposited to coverthe spacer elements 114, the etch stop layer 122, and the first gatestructure 106A, the second gate structure 106B and the third gatestructure 106C. In some embodiments, the dielectric material layer ismade of silicon oxide, silicon oxynitride, borosilicate glass (BSG),phosphoric silicate glass (PSG), borophosphosilicate glass (BPSG),fluorinated silicate glass (FSG), low-k material, porous dielectricmaterial, another suitable material, or a combination thereof. In someembodiments, the dielectric material layer is deposited using a CVDprocess, an ALD process, a spin-on process, a spray coating process,another applicable process, or a combination thereof.

Afterwards, a planarization process may be used to thin down andpartially remove the dielectric material layer. The dielectric materiallayer may be partially removed until the first gate structure 106A, thesecond gate structure 106B and the third gate structure 106C areexposed. As a result, the interlayer dielectric layer 126 is formed. Insome embodiments, the planarization process includes a CMP process, agrinding process, a dry polishing process, an etching process, anotherapplicable process, or a combination thereof.

However, embodiments of the disclosure are not limited thereto. In someother embodiments, the interlayer dielectric layer 126 is formed in theopening 125 by a flowable chemical vapor deposition (FCVD). In someembodiments, in the flowable chemical vapor deposition, the interlayerdielectric layer 126 is cured by steam annealing. In some embodiments,since the etch stop layer 122 does not cover the upper portion of thespacer elements 114 as shown in FIG. 1E, the opening 125 has a widerwidth compared to the structure with the etch stop layer covering theupper portion of the spacer elements. In some embodiments, the widerwidth of the opening 125 increases the efficiency of the steam annealingfor curing the interlayer dielectric layer 126. Therefore, the qualityof the interlayer dielectric layer 126 may be improved.

In addition, in some cases, the etch stop layer is grown from ordeposited over both the top surface of the source/drain portion and theside surface of the spacer elements. In some cases, the upper portionand the lower portion of the spacer elements are covered by the etchstop layer. Therefore, the thicker the portion of the etch stop layercovering the top surface of the source/drain portion, the thicker theportion of the etch stop layer covering the upper portion of the spacerelements. In some cases, the thickness of the etch stop layer over theupper portion of the spacer elements cannot be too thick in order toleave sufficient space or opening for the formation of the interlayerdielectric layer and the subsequently formed contact plug. In thesecases, since the thickness of the portion of the etch stop layer overthe upper portion of the spacer elements is limited, the thickness ofthe portion of the etch stop layer over the top surface of thesource/drain portion is also limited. Therefore, in some cases, if theportion of the etch stop layer over the top surface of the source/drainportion has a limited and insufficient thickness, the etch stop layercannot prevent the source/drain portion from being oxidized in theprocess of forming the interlayer dielectric layer. If the source/drainportion is oxidized, the electrical resistance of the source/drainportion would increase, and the quality of the semiconductor devicestructure would decrease.

In some embodiments, since the etch stop layer 122 is grown from ordeposited over the top surface 120 of the source/drain portion 118, butis not grown from or deposited over the side surface 124 of the spacerelements 114, some embodiments of the present disclosure may form theetch stop layer 122 with any designed thickness. Therefore, the etchstop layer 122 in some embodiments has a sufficient thickness to preventthe source/drain portion 118 from being oxidized in the process offorming the interlayer dielectric layer 126. Therefore, in someembodiments, the quality of the semiconductor device structure wouldincrease.

As shown in FIGS. 1G and 1H, one or more gate replacement processes aresubsequently performed to replace the first gate structure 106A, thesecond gate structure 106B and the third gate structure 106C with othergate structures, in accordance with some embodiments. In someembodiments, the gate replacement process is a metal gate replacementprocess and the first gate structure 106A, the second gate structure106B and the third gate structure 106C are replaced with suitable metalmaterials. However, embodiments of the disclosure are not limitedthereto. In some other embodiments, one or more of the first gatestructure 106A, the second gate structure 106B and the third gatestructure 106C are not replaced.

As shown in FIG. 1G, after the formation of the interlayer dielectriclayer 126, the first gate structure 106A, the second gate structure 106Band the third gate structure 106C are removed to form recesses 128A,128B and 128C, as shown in FIG. 1G in accordance with some embodiments.The recesses 128A, 128B and 128C expose the fin structure 102. One ormore etching processes may be used to form the recesses 128A, 128B and128C.

In some embodiments, the first gate structure 106A, the second gatestructure 106B and the third gate structure 106C are removed using a wetetching process. For example, an etching solution containing NH₄OHsolution, dilute-HF, other suitable etching solution, or a combinationthereof may be used. In some embodiments, the first gate structure 106A,the second gate structure 106B and the third gate structure 106C areremoved using a dry etching process. Example etchants includes fluorineand/or chlorine based etchants.

As shown in FIG. 1H, a fourth gate structure 130A, a fifth gatestructure 130B and a sixth gate structure 130C are respectively formedin the recesses 128A, 128B and 128C, in accordance with someembodiments. In some embodiments, the fourth gate structure 130A, thefifth gate structure 130B and the sixth gate structure 130C are metalgate structures. In some embodiments, the spacer elements 114 arepositioned over the sidewalls of the fourth gate structure 130A, thefifth gate structure 130B and the sixth gate structure 130C.

As shown in FIG. 1H, the fourth gate structure 130A is formed over thetop surface of the fin structure 102, in accordance with someembodiments. As shown in FIG. 1H, the fourth gate structure 130Aincludes a fourth gate dielectric layer 132A, a fourth work functionlayer 134A, and a fourth conductive filling layer 136A, in accordancewith some embodiments. As shown in FIG. 1H, the fourth gate dielectriclayer 132A is over the top surface of the fin structure 102 of thesemiconductor substrate 100, the fourth work function layer 134A isconformally deposited over the fourth gate dielectric layer 132A, andthe fourth conductive filling layer 136A is deposited over the fourthwork function layer 134A, in accordance with some embodiments.

As shown in FIG. 1H, the fifth gate structure 130B and sixth gatestructure 130C are positioned at opposite ends of the fin structure 102,in accordance with some embodiments. As shown in FIG. 1H, the fourthgate structure 130A is positioned between the fifth gate structure 130Band sixth gate structure 130C, in accordance with some embodiments.

As shown in FIG. 1H, the fifth gate structure 130B is formed over aportion of the top surface of the fin structure 102, over the sidesurface of the fin structure 102 at one end of the fin structure 102,and over the isolation structure 104, in accordance with someembodiments. As shown in FIG. 1H, the sixth gate structure 130C isformed over a portion of the top surface of the fin structure 102, overthe side surface of the fin structure 102 at the other end of the finstructure 102, and over the isolation structure 104, in accordance withsome embodiments.

As shown in FIG. 1H, the fifth gate structure 130B includes a fifth gatedielectric layer 132B, a fifth work function layer 134B, and a fifthconductive filling layer 136B, in accordance with some embodiments. Asshown in FIG. 1H, the fifth gate dielectric layer 132B is over a portionof the top surface of the fin structure 102, over the side surface ofthe fin structure 102 at one end of the fin structure 102, and over theisolation structure 104, in accordance with some embodiments. As shownin FIG. 1H, the fifth work function layer 134B is conformally depositedover the fifth gate dielectric layer 132B, and the fifth conductivefilling layer 136B is deposited over the fifth work function layer 134B,in accordance with some embodiments.

As shown in FIG. 1H, the sixth gate structure 130C includes a sixth gatedielectric layer 132C, a sixth work function layer 134C, and a sixthconductive filling layer 136C, in accordance with some embodiments. Asshown in FIG. 1H, the sixth gate dielectric layer 132C is over a portionof the top surface of the fin structure 102, over the side surface ofthe fin structure 102 at the other end of the fin structure 102, andover the isolation structure 104, in accordance with some embodiments.As shown in FIG. 1H, the sixth work function layer 134C is conformallydeposited over the sixth gate dielectric layer 132C, and the sixthconductive filling layer 136C is deposited over the sixth work functionlayer 134C, in accordance with some embodiments.

In some embodiments, the materials of the fourth gate dielectric layer132A, the fifth gate dielectric layer 132B and the sixth gate dielectriclayer 132C are the same. In some embodiments, the fourth gate dielectriclayer 132A, the fifth gate dielectric layer 132B and the sixth gatedielectric layer 132C are made of a high-k material. In someembodiments, the high-k material may include, but is not limited to,metal oxide, metal nitride, metal silicide, transition metal oxide,transition metal nitride, transition metal silicide, transition metaloxynitride, metal aluminate, zirconium silicate, zirconium aluminate.For example, the material of the high-k material may include, but is notlimited to, LaO, AlO, ZrO, TiO, Ta₂O₅, Y₂O₃, SrTiO₃(STO), BaTiO₃(BTO),BaZrO, HfO₂, HfO₃, HfZrO, HfLaO, HfSiO, HfSiON, LaSiO, AlSiO, HfTaO,HfTiO, HfTaTiO, HfAlON, (Ba,Sr)TiO₃(BST), Al₂O₃, another suitable high-kdielectric material, or a combination thereof.

The fourth work function layer 134A, the fifth work function layer 134Band the sixth work function layer 134C are used to provide the desiredwork function for transistors to enhance device performance. In someembodiments, the fourth work function layer 134A, the fifth workfunction layer 134B and/or the sixth work function layer 134C are n-typemetal layers capable of providing a work function value suitable for thedevice, such as equal to or less than about 4.5 eV. In some embodiments,the fourth work function layer 134A, the fifth work function layer 134Band/or the sixth work function layer 134C are p-type metal layerscapable of providing a work function value suitable for the device, suchas equal to or greater than about 4.8 eV.

In some embodiments, the fourth work function layer 134A, the fifth workfunction layer 134B and the sixth work function layer 134C are metallayers with same type, such as the n-type metal layer. In some otherembodiments, one or more of the fourth work function layer 134A, thefifth work function layer 134B and the sixth work function layer 134Care metal layers with a type different from that of the others of thefourth work function layer 134A, the fifth work function layer 134B andthe sixth work function layer 134C.

The n-type metal layer may include metal, metal carbide, metal nitride,or a combination thereof. For example, the n-type metal layer includestitanium nitride, tantalum, tantalum nitride, other suitable materials,or a combination thereof. The p-type metal layer may include metal,metal carbide, metal nitride, other suitable materials, or a combinationthereof. For example, the p-type metal includes tantalum nitride,tungsten nitride, titanium, titanium nitride, other suitable materials,or a combination thereof.

The thickness and/or the compositions of the fourth work function layer134A, the fifth work function layer 134B and the sixth work functionlayer 134C may be fine-tuned to adjust the work function level. Forexample, a titanium nitride layer may be used as a p-type metal layer oran n-type metal layer, depending on the thickness and/or thecompositions of the titanium nitride layer.

In some embodiments, a barrier layer (not shown) is formed between thegate dielectric layer and the work function layer. The barrier layer maybe made of titanium nitride, tantalum nitride, another suitablematerial, or a combination thereof. In some embodiments, a blockinglayer (not shown) is formed over the work function layer before theformation of the fourth conductive filling layer 136A, the fifthconductive filling layer 136B and/or sixth conductive filling layer136C. The blocking layer may be made of tantalum nitride, titaniumnitride, another suitable material, or a combination thereof.

In some embodiments, the materials of the fourth conductive fillinglayer 136A, the fifth conductive filling layer 136B and/or sixthconductive filling layer 136C are the same. In some embodiments, thefourth conductive filling layer 136A, the fifth conductive filling layer136B and/or sixth conductive filling layer 136C are made of copper,aluminum, gold, tungsten, molybdenum, titanium, tantalum, platinum,hafnium, another suitable material, or a combination thereof.

In some embodiments, multiple layers are deposited over the interlayerdielectric layer 126 to fill the recesses 128A, 128B and 128C.Specifically, in some embodiments, a gate dielectric material layer, awork function material layer and a conductive filling material layer aresequentially deposited over the interlayer dielectric layer 126 to fillthe recesses 128A, 128B and 128C. Afterwards, a planarization process isperformed to remove the portions of these layers outside of the recesses128A, 128B and 128C. The remaining portions of these layers in therecesses 128A, 128B and 128C form the fourth gate structure 130A, thefifth gate structure 130B and the sixth gate structure 130C,respectively. The planarization process may include a chemicalmechanical polishing (CMP) process, a grinding process, a dry polishingprocess, an etching process, another applicable process, or acombination thereof.

In some embodiments, the top surfaces of the fourth gate structure 130A,the fifth gate structure 130B and the sixth gate structure 130C aresubstantially coplanar with the top surface of the interlayer dielectriclayer 126 after the planarization process.

Within the context of this specification, the word “substantially” meanspreferably at least 90%, more preferably 95%, even more preferably 98%,most preferably 99%.

As shown in FIG. 1I, openings 138 are formed in the interlayerdielectric layer 126 to expose the source/drain portions 118, inaccordance with some embodiments. In some embodiments, the formation ofthe openings 138 includes patterning the interlayer dielectric layer 126by a photolithography process, etching the exposed surface of theinterlayer dielectric layer 126 (for example, by using a dry etchingprocess, a wet etching process, a plasma etching process, or acombination thereof) to form the openings 138.

As shown in FIG. 1I, the openings 138 penetrate through the interlayerdielectric layer 126 and the etch stop layer 122 to expose thesource/drain portions 118, in accordance with some embodiments.

Afterwards, contact plugs 140 are formed in the interlayer dielectriclayer 126 to form the semiconductor device structure 1000. As shown inFIG. 1J, the two contact plugs 140 are respectively electricallyconnected to the two source/drain portion 118 at opposite sides of thefourth gate structure 130A, in accordance with some embodiments. Asshown in FIG. 1J, the contact plug 140 penetrates through the interlayerdielectric layer 126 and the etch stop layer 122, and electricallyconnected to the source/drain portion 118, in accordance with someembodiments. As shown in FIG. 1J, the contact plug 140 is in directcontact with the source/drain portion 118, in accordance with someembodiments.

As shown in FIG. 1J, the contact plug 140 is aligned with thesource/drain portion 118. In some embodiments, each of the contact plugs140 are made of a single layer or multiple layers of copper, aluminum,tungsten, gold, chromium, nickel, platinum, titanium, iridium, rhodium,an alloy thereof, a combination thereof, or another conductive material.

In some embodiments, a conductive material layer is deposited over theinterlayer dielectric layer 126 and fills into the openings 138. In someembodiments, the conductive material layer is deposited by usingchemical vapor deposition (CVD), sputtering, resistive thermalevaporation, electron beam evaporation, or another applicable method.

Afterwards, a planarization process may be used to partially remove theconductive material layer. The conductive material layer may bepartially removed until the interlayer dielectric layer 126 is exposed.As a result, the conductive material layer that remains in the openings138 forms the contact plugs 140. In some embodiments, the planarizationprocess includes a CMP process, a grinding process, a dry polishingprocess, an etching process, another applicable process, or acombination thereof.

In some embodiments, since the etch stop layer 122 does not cover theside surface 124 of the upper portion of the spacer elements 114 asshown in FIGS. 1E and 1J, the opening 125 shown in FIG. 1E has widerwidth compared to the structure with the etch stop layer covering theupper portion of the spacer elements. In some embodiments, the opening125 is the space in which the contact plug 140 is formed. Therefore, insome embodiments, there is more space for the formation of the contactplug 140 since the etch stop layer 122 does not cover the side surface124 of the upper portion of the spacer elements 114. Therefore, there isa bigger process window for the formation of the contact plug 140.Therefore, in some embodiments, the manufacturing yield or the qualityof the contact plug 140 may increase.

In addition, in some embodiments, since the etch stop layer 122 does notcover the side surface 124 of the upper portion of the spacer elements114 as shown in FIGS. 1E and 1J, the dielectric constant between thecontact plugs 140 and the gate structures including the fourth gatestructure 130A, the fifth gate structure 130B and the sixth gatestructure 130C is reduced. Therefore, the RC delay would be reduced. Insome embodiments, the ring oscillator performance of the semiconductordevice structure 1000 is improved. Therefore, in some embodiments, theperformance of the semiconductor device structure 1000 is improved.

In addition, since the etch stop layer 122 in some embodiments hassufficient thickness, the etching capability for forming the openings138 is also improved. In addition, the method of some embodiments of thepresent disclosure is easy to integrate.

It should be noted that the exemplary embodiment set forth in FIGS.1A-1J is merely for the purpose of illustration. In addition to theembodiment set forth in FIGS. 1A-1J, the semiconductor device structuremay have other configuration as shown in FIG. 3. This will be describedin more detail in the following description. Therefore, the presentdisclosure is not limited to the exemplary embodiment shown in FIGS.1A-1J.

FIG. 3 is a cross-sectional view of a semiconductor device structure3000 in accordance with some other embodiments of the presentdisclosure. Note that the same or similar elements or layerscorresponding to those of the semiconductor device are denoted by likereference numerals. In some embodiments, the same or similar elements orlayers denoted by like reference numerals have the same meaning and willnot be repeated for the sake of brevity.

As shown in FIG. 3, the spacer elements 114, the fourth gate structure130A, the fifth gate structure 130B, the sixth gate structure 130C, theetch stop layer 122, the interlayer dielectric layer 126 and the contactplug 140 are not positioned over any fin structure of the semiconductorsubstrate 100, in accordance with some embodiments. As shown in FIG. 3,the spacer elements 114, the fourth gate structure 130A, the fifth gatestructure 130B, the sixth gate structure 130C, the etch stop layer 122,the interlayer dielectric layer 126 and the contact plug 140 arepositioned over a planar region of the semiconductor substrate 100, inaccordance with some embodiments.

As shown in FIG. 3, the source/drain portions 118 are not positioned inany fin structure of the semiconductor substrate 100, in accordance withsome embodiments. As shown in FIG. 3, the source/drain portions 118 arepositioned in the planar region of the semiconductor substrate 100, inaccordance with some embodiments.

In some embodiments, since the etch stop layer does not cover the sidesurface of the upper portion of the spacer elements, there is more spacefor the formation of the contact plug. Therefore, the process window forthe formation of the contact plug is enlarged. Therefore, in someembodiments, the manufacturing yield and/or the quality of the contactplug may improve.

In addition, in some embodiments, since the etch stop layer does notcover the side surface of the upper portion of the spacer elements, thedielectric constant between the contact plugs and the gate structures isreduced. Therefore, the RC delay would be reduced. In some embodiments,the performance of the semiconductor device structure is improved.

Embodiments of the disclosure can be applied to not only a semiconductordevice structure with FinFETs but also a semiconductor device structurewith planar FETs. Furthermore, embodiments of the disclosure are notlimited and may be applied to fabrication processes for any suitabletechnology generation. Various technology generations include a 20 nmnode, a 16 nm node, a 10 nm node, and other suitable nodes.

In accordance with some embodiments, a method for forming asemiconductor device structure is provided. The method includesproviding a substrate. The method includes forming a gate structure overthe substrate. The gate structure has a first sidewall. The methodincludes forming a spacer element over the first sidewall of the gatestructure. The method includes forming a source/drain portion adjacentto the spacer element and the gate structure. The source/drain portionhas a first top surface. The method includes depositing an etch stoplayer over the first top surface of the source/drain portion. The etchstop layer is made of nitride. The method includes forming a dielectriclayer over the etch stop layer. The dielectric layer has a secondsidewall and a bottom surface, the etch stop layer is in direct contactwith the bottom surface, and the spacer element is in direct contactwith the second sidewall.

In accordance with some embodiments, a method for forming asemiconductor device structure is provided. The method includesproviding a substrate. The method includes forming a gate structure overthe substrate. The gate structure has a sidewall. The method includesforming a spacer element over the sidewall of the gate structure. Themethod includes forming a source/drain portion adjacent to the spacerelement and the gate structure. The source/drain portion has a topsurface. The method includes forming a nitride etch stop layer over thetop surface of the source/drain portion. The nitride etch stop layer hasa first sidewall. The method includes forming a dielectric layer overthe etch stop layer. The dielectric layer has a second sidewall, thefirst sidewall and the second sidewall are substantially coplanar, andthe first sidewall and the second sidewall both face the spacer element.

In accordance with some embodiments, a semiconductor device structure isprovided. The semiconductor device structure includes a substrate. Thesemiconductor device structure includes a gate structure over thesubstrate. The gate structure has a first sidewall. The semiconductordevice structure includes a spacer element over the first sidewall ofthe gate structure. The semiconductor device structure includes asource/drain portion in the substrate adjacent to the spacer element.The source/drain portion has a top surface. The semiconductor devicestructure includes an etch stop layer over the top surface of thesource/drain portion. The etch stop layer is made of nitride. Thesemiconductor device structure includes a dielectric layer over the etchstop layer. The dielectric layer has a second sidewall and a bottomsurface, the etch stop layer is in direct contact with the bottomsurface, and the spacer element is in direct contact with the secondsidewall.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method for forming a semiconductor devicestructure, comprising: providing a substrate; forming an isolationstructure over the substrate, wherein the isolation structure laterallysurrounds a portion of the substrate; forming a gate structure over theportion of the substrate, wherein the gate structure has a firstsidewall; forming a spacer element over the first sidewall of the gatestructure; forming a source/drain portion adjacent to the spacer elementand the gate structure, wherein the source/drain portion has a first topsurface; depositing an etch stop layer over the first top surface of thesource/drain portion using an atomic layer deposition process, whereinthe etch stop layer is made of nitride, and the atomic layer depositionprocess comprises: forming a nitride layer over the first top surface ofthe source/drain portion by performing a nitridation process, whereinduring the nitridation process, nitridation of the first top surface ofthe source/drain portion starts at a time-point, and nitridation of thespacer element does not start at the time-point; and forming adielectric layer over the etch stop layer and the isolation structure,wherein topmost surfaces of the dielectric layer and the gate structureare substantially level with each other, the dielectric layer has asecond sidewall and a bottom surface, the etch stop layer is in directcontact with the bottom surface, the spacer element is in direct contactwith the second sidewall, and the dielectric layer is in direct contactwith the isolation structure.
 2. The method as claimed in claim 1,wherein the spacer element is further in direct contact with the etchstop layer.
 3. The method as claimed in claim 1, wherein the spacerelement has a third sidewall facing away from the gate structure, andthe third sidewall is in direct contact with the second sidewall.
 4. Themethod as claimed in claim 1, further comprising: partially removing thedielectric layer and the etch stop layer to form an opening passingthrough the dielectric layer and the etch stop layer and exposing thesource/drain portion; and forming a contact structure in the opening. 5.The method as claimed in claim 4, wherein the contact structure is indirect contact with the dielectric layer, the etch stop layer and thesource/drain portion.
 6. The method as claimed in claim 1, wherein thespacer element has a second top surface and a third sidewall, the etchstop layer exposes the third sidewall, and the third sidewall faces awayfrom the gate structure.
 7. The method for forming the semiconductordevice structure as claimed in claim 1, wherein the nitride layer is indirect contact with the first top surface of the source/drain portion.8. The method for forming the semiconductor device structure as claimedin claim 7, wherein the nitride layer is a monatomic layer.
 9. Themethod for forming the semiconductor device structure as claimed inclaim 1, wherein the etch stop layer is made of silicon nitride.
 10. Themethod for forming the semiconductor device structure as claimed inclaim 9, wherein the atomic layer deposition process further comprises:forming a silicon layer over the nitride layer by performing a silicondeposition process.
 11. A method for forming a semiconductor devicestructure, comprising: providing a substrate; forming a gate structureover the substrate, wherein the gate structure has a first sidewall;forming a spacer element over the first sidewall of the gate structure;forming a source/drain portion adjacent to the spacer element and thegate structure, wherein the source/drain portion has a top surface;forming a nitride etch stop layer over the top surface of thesource/drain portion, wherein the nitride etch stop layer has a secondsidewall, and the forming of the nitride etch stop layer over the topsurface of the source/drain portion comprises: performing an atomiclayer deposition process, wherein the atomic layer deposition processcomprises: performing a nitridation process from a nitridation starttime-point to a nitridation end time-point to form a nitride layer overthe top surface of the source/drain portion, wherein nitridation of thetop surface of the source/drain portion starts at a first time-pointfrom the nitridation start time-point, wherein nitridation of the spacerelement starts at a second time-point from the nitridation starttime-point, and wherein the second time-point is greater than the firsttime-point; and forming a dielectric layer over the nitride etch stoplayer, wherein topmost surfaces of the dielectric layer and the gatestructure are substantially level with each other, the dielectric layerhas a third sidewall, the second sidewall and the third sidewall aresubstantially coplanar, and the second sidewall and the third sidewallboth face the spacer element.
 12. The method as claimed in claim 11,wherein the spacer element is in direct contact with the second sidewallof the nitride etch stop layer and the third sidewall of the dielectriclayer.
 13. The method as claimed in claim 11, wherein the nitride etchstop layer is in direct contact with the source/drain portion, thedielectric layer, and the spacer element.
 14. The method as claimed inclaim 11, wherein the nitridation end time-point is between the firsttime-point and the second time-point.
 15. A semiconductor devicestructure, comprising: a substrate; an isolation structure over thesubstrate, wherein the isolation structure laterally surrounds a portionof the substrate; a gate structure over the portion of the substrate,wherein the gate structure has a first sidewall; a spacer element overthe first sidewall of the gate structure; a source/drain portion in thesubstrate adjacent to the spacer element, wherein the source/drainportion has a top surface; an etch stop layer over the top surface ofthe source/drain portion, wherein the etch stop layer comprises: anitride layer over the top surface of the source/drain portion andhaving a second sidewall, wherein the second sidewall faces and is indirect contact with the spacer element; and a silicon layer over thenitride layer and having a third sidewall, wherein the third sidewallfaces and is in direct contact with the spacer element, and the secondsidewall and the third sidewall are substantially level with each other;and a dielectric layer over the etch stop layer and the isolationstructure, wherein topmost surfaces of the dielectric layer and the gatestructure are substantially level with each other, the dielectric layerhas a fourth sidewall and a bottom surface, the etch stop layer is indirect contact with the bottom surface, the spacer element is in directcontact with the fourth sidewall, and the dielectric layer is in directcontact with the isolation structure.
 16. The semiconductor devicestructure as claimed in claim 15, wherein the etch stop layer has afifth sidewall, and the fourth sidewall and the fifth sidewall arealigned with each other.
 17. The semiconductor device structure asclaimed in claim 16, wherein the spacer element is in direct contactwith the fifth sidewall of the etch stop layer.
 18. The semiconductordevice structure as claimed in claim 16, wherein the fifth sidewall isbetween the fourth sidewall and the source/drain portion.
 19. Thesemiconductor device structure as claimed in claim 15, wherein thebottom surface of the dielectric layer over the isolation structure islower than a top surface of the portion of the substrate.
 20. Thesemiconductor device structure as claimed in claim 15, wherein thedielectric layer is separated from the source/drain portion by the etchstop layer.